On January 14, a 토토사이트 3 3 team led by Professor Wie Jeong-jae of the Department of Organic and Nano Engineering at Hanyang University announced that its paper on next-generation polishing technology using microrobots was selected as the best paper of 2024 by the internationally renowned academic journal Small Structures.

The Small journal series, published by the international academic publisher Wiley, is an internationally renowned scientific journal that covers diverse topics such as energy, catalysis, robotics, and healthcare while focusing on nanoscale and microscale 토토사이트 3 3, and the series includes journals such as Small, Small Methods, Small Science, and Small Structures. The best papers of 2024 were personally selected by the editors-in-chief of each journal.

Professor Wie's research team developed a technology that uses a high-speed rotating magnetic microrobot, the "Spinbot," to remove nanoscale surface contaminants and proved its potential for application in precision manufacturing processes such as semiconductor and optical component production.

The Spinbot demonstrated exceptional performance by removing 99.6% of contaminants from copper-coated wafer surfaces used in semiconductor manufacturing and by reducing the surface roughness of copper films to approximately 1.8mm. In particular, its polishing system is over 1,000 times lighter than the large-scale equipment used in traditional chemical mechanical polishing (CMP) processes for semiconductors, and it significantly improved polishing efficiency by operating multiple Spinbots simultaneously to polish specific locations on several wafers.

"I am delighted to introduce the collective behavior of microrobots to the new application area of ultraprecision polishing technology," said Professor Wie. "We will continue to research so that we can further develop this technology."

This 토토사이트 3 3 was supported by the C2 Project of the Ministry of Science and ICT, National 토토사이트 3 3 Foundation of Korea and KAIST, and the findings of the 토토사이트 3 3 were published online in Small Structures on September 9, 2024.

The paper, Spatially Selective Ultraprecision Polishing and Cleaning by Collective Behavior of Micro Spinbots, was conducted as a joint study with Professor Kim San-ha's 토토사이트 3 3 team of the Department of Mechanical Engineering at KAIST, while KAIST 토토사이트 3 3er Je Hyeong-min and Doctor Won Su-kyoung of Hanyang University (Currently California Institute of Technology) contributed as the first author and co-author, respectively.